Equipment: Specialty Coating Systems Spincoater

Description

The clean room spin coater is for spin coating of polymer materials for creating metal/polymer bilayers and spin coating of photoresist for patterning the photolithography process.

Specifications:

  • Speed: 0-9999 RPM.
  • Can handle substrate sizes within a radius of 6” inch.

Location

CNM Cleanroom

FNT 4.106

Fees

$30.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

No charge when used in conjunction with Suss MA6 Mask Aligner or Raith50 Electron Beam Lithography System

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class.  External/Corporate users must contact CNM to setup an account before attending facility user education classes.

Fee: $27.00

Contact

Dr. Damon Smith

damonsmith@austin.utexas.edu

(512) 232-3695