Equipment: Specialty Coating Systems Spincoater
The clean room spin coater is for spin coating of polymer materials for creating metal/polymer bilayers and spin coating of photoresist for patterning the photolithography process.
- Speed: 0-9999 RPM.
- Can handle substrate sizes within a radius of 6” inch.
$30.00 per hour for UT Austin users
$54.00 per hour for external university users
$65.00 per hour for corporate users
No charge when used in conjunction with Suss MA6 Mask Aligner or Raith50 Electron Beam Lithography System
Facility User Education
To become a user of this instrument please sign up for the next available NT201 facility user education class. External/Corporate users must contact CNM to setup an account before attending facility user education classes.
Dr. Damon Smith