Equipment: MPT RTP-600S Rapid Thermal Annealer

Description

The system allows ultra fast heating for annealing metal contacts (silicon).

Features

  • Accessible processing temperatures from 250ºC to 1300ºC.
  • The temperature ramp rate may be up to a maximum of 150ºC/sec.
  • Temperature measurements: a type K thermocouple is used from 250ºC to 800ºC and a pyrometer is used from 800ºC to 1300ºC. Process data may be collected during a run cycle and stored in a data file for later display and analysis. The process and recipe data files are internally stored as DIF (Data Interchange Format) and can be exported as text files.

Location

CNM Cleanroom

FNT 4.106

Fees

$30.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class.  Please contact Dr. Damon Smith for specific instrument training. External/Corporate users must contact CNM to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00

Contact

Dr. Damon Smith

damonsmith@austin.utexas.edu

(512) 232-3695