Equipment: Suss PM 5 probe station
The Karl Suss PM 5 probe station consists of a stereo microscope, a 6 inch vacuum chuck which allows single chips as well as up to 6 inch wafers to be probed, 4 micromanipulators, and a light tight enclosure. It can be coupled to various test equipment for device testing such as I-V measurements.
CNM Cleanroom FNT 4.106
$30.00 per hour for UT Austin users
$54.00 per hour for external university users
$65.00 per hour for corporate users
User pays Cleanroom Fee if used in the CNM Cleanroom
Facility User Education
To become a user of this instrument please sign up for the next available NT227 facility user education classes. External/Corporate users must contact CNM to setup an account before attending facility user education classes.
Dr. Damon Smith