Equipment: Suss PM 5 probe station


The Karl Suss PM 5 probe station consists of a stereo microscope, a 6 inch vacuum chuck which allows single chips as well as up to 6 inch wafers to be probed, 4 micromanipulators, and a light tight enclosure. It can be coupled to various test equipment for device testing such as I-V measurements.


CNM Cleanroom FNT 4.106


$30.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

User pays Cleanroom Fee if used in the CNM Cleanroom

Facility User Education

To become a user of this instrument please sign up for the next available NT227 facility user education classes.  External/Corporate users must contact CNM to setup an account before attending facility user education classes.

Fee: $30.00


Dr. Damon Smith

(512) 232-3695