Equipment: Cooke Ebeam/Sputter Deposition System
- Ebeam evaporator for metals and certain oxides
- RF sputter head for oxides and metals
- DC sputter head for metals
- Targets for sputtering should be 3" diameter and 1/8" to 1/4" thickness
- Aluminum sputter targets and copper crucible provided by CNM
- Sample rotation available
All other materials for evaporation must be provided by the user.
$30.00 per hour for UT Austin users
$54.00 per hour for external university users
$65.00 per hour for corporate users
Facility User Education
To become a user of this instrument please sign up for the next available NT201 and NT209 facility user education classes. External/Corporate users must contact CNM to setup an account before attending facility user education classes.
NT201 Cleanroom Safety Fee: $27.00
NT209 Thin Film Deposition Fee: $63.00
Dr. Damon Smith