Equipment: Cooke Ebeam/Sputter Deposition System

Features

  • Ebeam evaporator for metals and certain oxides
  • RF sputter head for oxides and metals
  • DC sputter head for metals
  • Targets for sputtering should be 3" diameter and 1/8" to 1/4" thickness
  • Aluminum sputter targets and copper crucible provided by CNM
  • Sample rotation available

All other materials for evaporation must be provided by the user.

Location

CNM Cleanroom

FNT 4.106

Fees

$30.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

Facility User Education

To become a user of this instrument please sign up for the next available NT201 and NT209 facility user education classes.  External/Corporate users must contact CNM to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00

NT209 Thin Film Deposition Fee: $63.00

Contact

Dr. Damon Smith

damonsmith@austin.utexas.edu

(512) 232-3695