Equipment: AMOD PVD System

Description

The AMOD PVD system can be used to deposit a wide range of materials including metals and organic materials. The AMOD is a resistive thermal evaporation system. The system has six sources available. The process is controlled using quartz rate sensors.

Features

  • The system operation is fully controlled by software.
  • Recipe based advanced multi-layer deposition control.
  • Sequential or co-deposition of materials
  • The system is integrated into MBraun glovebox system. The system access can be performed from both the inside of the glovebox or the outside
  • Recipe based advanced multi-layer deposition control
  • The system is integrated into MBraun glovebox system.
  • Stainless steel isolation shields help to protect sources from cross contamination
  • The glovebox is interfaced with a second glovebox which incorporates a spincoater and a heating plate

Location

FNT 4.106

Fees

$30.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

Facility User Education

To become a user of this instrument please sign up for the next available NT201 and NT210 facility user education classes.  External/Corporate users must contact CNM to setup an account before attending facility user education classes.

Fee: $63.00

Contact

Dr. Raluca Gearba

gearba@austin.utexas.edu

(512) 471-2589